High Purity Gases

High purity Gas
구분 Matrix Purity Unit Cylinder Spec. Remarks
고순도
가스
(99.999%)
H2 99.999 % 10L(STEEL)
47L(STEEL)
 
N2 99.999
O2 99.995~99.999
Ar 99.999
Air-zero 99.995~99.999
He 99.999
초고순도
가스
(99.9999%)
H2 99.9999 % 47L(STEEL)  
N2 99.9999
Ar 99.9999
He 99.9999
기타
상품 가스
(99.5%이상)
C2H2 99.5~99.6 % 40L(STEEL)  
CO 99.5~99.998 47L(STEEL,AL)
CH4 99.95~99.995 44L(STEEL)
47L(STEEL)
 
C2H4 99.5~99.8 40L(STEEL)
C2H6 99.5 47L(STEEL)
C3H8 99.5~99.9 108L
C3H6 99.5~99.95 108L
C4H10 99.5~99.95 108L
C5H12 99.5 108L
SF6 99.95~99.999 47L(STEEL)
CO2 99.999 47L(STEEL)
기타   47L(STEEL)